D. Tsoukalas and D. Kouvatsos. q 0 0 580 780 re W n BT /NewFont:0 8 Tf 0 Tr 0.4000 g 1.0000 0.0000 0.0000 1.0000 43.9200 10.0000 Tm 0 Tw 0 Tc (Downloaded 21 Mar 2002 to 141.213.8.164. Hitherto, in decreasing loss from 77 dB/cm to 15 dB/cm, we had minimized loss from surface scattering by improving the film surface morphology, and decreased bulk absorption with hydrogen passivation. 16, 421 (October 1995). Learn more about Institutional subscriptions. �Ga����ɍO T. Kamins, Polycrystalline Silicon for Integrated Circuit Applications, 2nd edition (Boston, MA: Kluwer Academic Publishers, 1991), p. 56. endobj - 211.14.175.50. <> In some commercial cameras, the wavelength response of silicon … Annealing in an oxygen ambient is not recommended because it always increases transmission loss. 4 0 obj %PDF-1.2 %���� 1 0 obj 653 endobj 2 0 obj 4627 endobj 3 0 obj 42 endobj 4 0 obj 44 endobj 5 0 obj 40 endobj 6 0 obj 42 endobj 7 0 obj 44 endobj 8 0 obj 44 endobj 9 0 obj 44 endobj 10 0 obj 44 endobj 11 0 obj 44 endobj 12 0 obj 43 endobj 13 0 obj 43 endobj 14 0 obj 45 endobj 15 0 obj 43 endobj 16 0 obj 44 endobj 17 0 obj 44 endobj 18 0 obj 45 endobj 19 0 obj 44 endobj 20 0 obj 44 endobj 21 0 obj 42 endobj 22 0 obj 45 endobj 23 0 obj 44 endobj 24 0 obj 45 endobj 25 0 obj 43 endobj 26 0 obj 44 endobj 27 0 obj 44 endobj 28 0 obj 45 endobj 29 0 obj 44 endobj 30 0 obj 42 endobj 31 0 obj 43 endobj 32 0 obj 43 endobj 33 0 obj 2188 endobj 34 0 obj 17885 endobj 35 0 obj 42 endobj 36 0 obj 43 endobj 37 0 obj 43 endobj 38 0 obj 44 endobj 39 0 obj 43 endobj 40 0 obj 45 endobj 41 0 obj 41 endobj 42 0 obj 42 endobj 43 0 obj 43 endobj 44 0 obj 45 endobj 45 0 obj 44 endobj 46 0 obj 44 endobj 47 0 obj 43 endobj 48 0 obj 43 endobj 49 0 obj 44 endobj 50 0 obj 45 endobj 51 0 obj 43 endobj 52 0 obj 44 endobj 53 0 obj 44 endobj 54 0 obj 45 endobj 55 0 obj 43 endobj 56 0 obj 44 endobj 57 0 obj 44 endobj 58 0 obj 45 endobj 59 0 obj 44 endobj 60 0 obj 45 endobj 61 0 obj 44 endobj 62 0 obj 44 endobj 63 0 obj 44 endobj 64 0 obj 43 endobj 65 0 obj 2432 endobj 66 0 obj 16631 endobj 67 0 obj 41 endobj 68 0 obj 43 endobj 69 0 obj 43 endobj 70 0 obj 44 endobj 71 0 obj 43 endobj 72 0 obj 45 endobj 73 0 obj 41 endobj 74 0 obj 41 endobj 75 0 obj 44 endobj 76 0 obj 45 endobj 77 0 obj 44 endobj 78 0 obj 43 endobj 79 0 obj 42 endobj 80 0 obj 42 endobj 81 0 obj 43 endobj 82 0 obj 44 endobj 83 0 obj 42 endobj 84 0 obj 43 endobj 85 0 obj 43 endobj 86 0 obj 44 endobj 87 0 obj 42 endobj 88 0 obj 44 endobj 89 0 obj 44 endobj 90 0 obj 44 endobj 91 0 obj 44 endobj 92 0 obj 45 endobj 93 0 obj 44 endobj 94 0 obj 44 endobj 95 0 obj 44 endobj 96 0 obj 42 endobj 97 0 obj 2258 endobj 98 0 obj 12676 endobj 99 0 obj 42 endobj 100 0 obj 43 endobj 101 0 obj 43 endobj 102 0 obj 44 endobj 103 0 obj 43 endobj 104 0 obj 45 endobj 105 0 obj 41 endobj 106 0 obj 42 endobj 107 0 obj 44 endobj 108 0 obj 45 endobj 109 0 obj 44 endobj 110 0 obj 44 endobj 111 0 obj 43 endobj 112 0 obj 43 endobj 113 0 obj 44 endobj 114 0 obj 45 endobj 115 0 obj 43 endobj 116 0 obj 44 endobj 117 0 obj 44 endobj 118 0 obj 45 endobj 119 0 obj 43 endobj 120 0 obj 44 endobj 121 0 obj 44 endobj 122 0 obj 45 endobj 123 0 obj 44 endobj 124 0 obj 45 endobj 125 0 obj 44 endobj 126 0 obj 44 endobj 127 0 obj 44 endobj 128 0 obj 43 endobj 129 0 obj 2204 endobj 130 0 obj 13067 endobj 131 0 obj 38 endobj 132 0 obj 43 endobj 133 0 obj 43 endobj 134 0 obj 44 endobj 135 0 obj 43 endobj 136 0 obj 43 endobj 137 0 obj 43 endobj 138 0 obj 45 endobj 139 0 obj 45 endobj 140 0 obj 44 endobj 141 0 obj 43 endobj 142 0 obj 44 endobj 143 0 obj 44 endobj 144 0 obj 45 endobj 145 0 obj 44 endobj 146 0 obj 44 endobj 147 0 obj 44 endobj 148 0 obj 45 endobj 149 0 obj 45 endobj 150 0 obj 45 endobj 151 0 obj 40 endobj 152 0 obj 42 endobj 153 0 obj 44 endobj 154 0 obj 44 endobj 155 0 obj 43 endobj 156 0 obj 42 endobj 157 0 obj 43 endobj 158 0 obj 43 endobj 159 0 obj 44 endobj 160 0 obj 42 endobj 161 0 obj 2195 endobj 162 0 obj 16114 endobj 163 0 obj 36 endobj 164 0 obj 42 endobj 165 0 obj 42 endobj 166 0 obj 43 endobj 167 0 obj 42 endobj 168 0 obj 42 endobj 169 0 obj 43 endobj 170 0 obj 44 endobj 171 0 obj 44 endobj 172 0 obj 44 endobj 173 0 obj 42 endobj 174 0 obj 43 endobj 175 0 obj 43 endobj 176 0 obj 44 endobj 177 0 obj 43 endobj 178 0 obj 43 endobj 179 0 obj 43 endobj 180 0 obj 44 endobj 181 0 obj 44 endobj 182 0 obj 44 endobj 183 0 obj 39 endobj 184 0 obj 42 endobj 185 0 obj 43 endobj 186 0 obj 44 endobj 187 0 obj 43 endobj 188 0 obj 42 endobj 189 0 obj 43 endobj 190 0 obj 43 endobj 191 0 obj 44 endobj 192 0 obj 42 endobj 193 0 obj 2377 endobj 194 0 obj 17609 endobj 195 0 obj 41 endobj 196 0 obj 43 endobj 197 0 obj 40 endobj 198 0 obj 41 endobj 199 0 obj 41 endobj 200 0 obj 44 endobj 201 0 obj 43 endobj 202 0 obj 42 endobj 203 0 obj 43 endobj 204 0 obj 44 endobj 205 0 obj 42 endobj 206 0 obj 44 endobj 207 0 obj 43 endobj 208 0 obj 43 endobj 209 0 obj 43 endobj 210 0 obj 43 endobj 211 0 obj 43 endobj 212 0 obj 42 endobj 213 0 obj 43 endobj 214 0 obj 44 endobj 215 0 obj 43 endobj 216 0 obj 44 endobj 217 0 obj 39 endobj 218 0 obj 42 endobj 219 0 obj 43 endobj 220 0 obj 43 endobj 221 0 obj 43 endobj 222 0 obj 43 endobj 223 0 obj 42 endobj 224 0 obj 41 endobj 225 0 obj 488 endobj 226 0 obj << /Filter [ /ASCII85Decode /LZWDecode ] /Length 488 >> stream Immediate online access to all issues from 2019. For such SMOE circuits, we need optical interconnects compatible with silicon technology. Tax calculation will be finalised during checkout. S. Ostapenko, L. Jastrzebski, J. Lagowski, and R.K. Smeltzer, Appl. gF/(+GaKo$qneLWDrQ#;5\S(\$q'4Q,85`-8;S(=Z"WSBOV*FM)4,?B],R endstream endobj 227 0 obj 2323 endobj 228 0 obj [ /Indexed /DeviceRGB 255 226 0 R ] endobj 229 0 obj 2262 endobj 230 0 obj 2223 endobj 231 0 obj 2262 endobj 232 0 obj 2317 endobj 233 0 obj 2256 endobj 234 0 obj 2311 endobj 235 0 obj 2236 endobj 236 0 obj 2478 endobj 237 0 obj << /Length 279 >> stream J.D. Fig. &�8 _����Z|���������������� endstream endobj 253 0 obj << /Type /XObject /Subtype /Image /Name /im239 /Filter /CCITTFaxDecode /Width 2400 /Height 109 /BitsPerComponent 1 /Decode [ 1 0 ] /ColorSpace /DeviceGray /Length 1201 /DecodeParms << /K -1 /Columns 2400 >> >> stream These operate in the infrared, most commonly at the 1.55 micrometre wavelength used by most fiber optic telecommunication systems. Arrows point to the oxygen absorption peaks. Signal propagation delays dominate over gate delays in the ever-shrinking ultra large scale integrated (ULSI) circuits. Huff, W. Bergholz, and K. Sumino (Pennington, NJ: The Electrochem. 1. dKoL!8Ka#EV,@V!\j8ZFbp6EE<9cn=N6j0nf;(&;QU6bUD')c@\ In this paper we provide techniques for minimizing optical transmission losses in polySi strip waveguides. 2 0 obj Giovane, “Strain-Balanced Silicon-Germanium Materials for Near IR Photodetection in Silicon-Based Optical Interconnects” (Ph.D. thesis, MIT, 1998). This is a preview of subscription content, log in to check access. @;b4 <> The wavelengths of visible light fall within the range of approximately 400 to 700 nanometers in the elec-tromagnetic spectrum. Kimerling, Appl. �G `u�UP�� � �6���t߂N�\�%�H�^BB�x�N@�h�Gm:�� Phys. coefficient of silicon for different photon energies and wavelengths. L.M. Article  L. Liao, “Low Loss Polysilicon Waveguides for Silicon Photonics” (Master’s thesis, MIT, 1997). One major challenge with using this material system, however, is its insertion loss. Figure 1 – Uncoated Silicon (Si) Transmission ... Wavelength (µm) dn/dT (x10 6/°C) 2.7 3.436 1.3 3.8 3.427 5.3 3.422 10.6 3.148 Zinc Sulfide (ZnS) aka Cleartran As can be seen in Figures 3 Zinc Sulfide can be used in a variety of imaging applications. ... of luminescence intensity at a fixed wavelength is measured as function of the excitation energy. Today (in 2006) silicon is the material of choice for visible detection, particularly as the imaging element in digital cameras. Ren, and J. Michel, Erbium-Doped Silicon for Integrated Optical Interconnects in Semiconductor Silicon, ed. Lett. In this paper we report a further reduction in the residual bulk loss from 15 dB/cm to 9 dB/cm. @�k�I��pI�_v���{A�M x3�A?YnDrC��~�n��Gl��_��h �A��g����ж“"„�7����]`����Ҧ8��� � �p�>`������H4�h��XA�������MWק��%`��('�/Yɻ[���q����rl%_ݫ�u���a^�o��T/� �&�]�7!G�@�~����?N�[�%~��ҿn����O�X��F��d��B̎Br�x�_��g�'��_���e?ӯ�.��������4��N�O0�M��*��́]1�_�����g���Zi���1�ar�9���U] Gp���޿ +A��>�P��o� ͛���9�s4���9z-����z��Ӷ���N��������8����8Z���p�g�H'���4�����u���U�x����-���VC~ҧ�^������m0��A���cW�7�[��,�>��60��a7�{���.�/4N}:�k' -��(�(xJ�v�xj߂�}z����>s1wVD�z����x@��aS��a�����XN�˿ �������D���[������d}��� �鶯��L+p|R����Ol%ު��R��b�KU�]5���l7�.�/�%U�k���������P������56���a}������.��3]߮�4Iv��18a5N3��*�i܂9��$�izp�B��0�l.��$���xu�"!��j�0f�z8?U�~""��@�����}��{��W����)ب�. concentration (10E16 cm-3 vs. about 10E18 cm-3 in OCz Si) FZ-Si is free of Oxygen peaks and can be used for more critical applications. CAS 

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